Wafer inspection

15,360 Px high resolution color and mono line scan camera
Master Slave synchronization of multiple cameras for robust image alignment
Multi Channel LED flash to enable acquisition of multiple illumination conditions in one scan
Modular setup for different wafer sizes
Perfect focused multiple camera system for defects resulting in high contrast
5 MLux illuminance
Water cooling for clean room environment
RGB LED for coating inspection via interference effects
High luminance for bright field setup
Compact design
Ultra thin beam splitter in coaxial module with anti reflection coating for highest image quality

Camera	Res/Pixel	FOV	Speed	Lens	Illumination	Controller	Others
CP000498-15K allPIXA wave 15k CL (2x)	10 µm	200 mm	145 mm/s	CC02242 inspec.x L 105mm f/5.6-0.5x (2x)	Dark field CP000200-1020C-04-5.0B1B Bright field (RGB) CP000200-C16-340H-RGB-0.5B0B Bright field (White) CP000200-CXT-340H-04-2.5B0B	CP000411-1F4 (2x)	CC02292 Focus Tube M95 inspec.x L 105 mm / 0.5x (2x)
CP000498-15K allPIXA wave 15k CL (3x)	10 µm	300 mm	145 mm/s	CC02242 inspec.x L 105mm f/5.6-0.5x (3x)	Dark field CP000200-C11-275A-04-5.0B1H Bright field (RGB) Bright field (White) CP000200-CXT-510H-04-2.5B0B	CP000411-1F4 (3x)	CC02292 Focus Tube M95 inspec.x L 105 mm / 0.5x (3x)
CP000498-15K allPIXA wave 15k CL (4x)	10 µm	450 mm	145 mm/s	CC02242 inspec.x L 105mm f/5.6-0.5x (4x)	Dark field CP000200-C11-500A-04-5.0B1H Bright field (RGB) CP000200-C16-680H-RGB-0.5B0B Bright field (White) CP000200-CXT-680H-04-2.5B0B	CP000411-1F4 (4x)	CC02292 Focus Tube M95 inspec.x L 105 mm / 0.5x (4x)