Wafer inspection
Application Challenges:
- High optical resolution needed (5 – 15µm/Px)
- Outstanding image quality to detect sub pixel sized defects
- Multiple light conditions required to allow for versatile failure detection
- Challenging production throughout and cycle time
Your Chromasens solution:
- 15,360 Px high resolution color and mono line scan camera
- Master Slave synchronization of multiple cameras for robust image alignment
- Multi Channel LED flash to enable acquisition of multiple illumination conditions in one scan
- Modular setup for different wafer sizes
- Perfect focused multiple camera system for defects resulting in high contrast
- 5 MLux illuminance
- Water cooling for clean room environment
- RGB LED for coating inspection via interference effects
- High luminance for bright field setup
- Compact design
- Ultra thin beam splitter in coaxial module with anti reflection coating for highest image quality
| Camera | Res/Pixel | FOV | Speed | Lens | Illumination | Controller | Others |
|
CP000498-15K |
10 µm
|
200 mm
|
145 mm/s
|
CC02242 |
Dark field Bright field (RGB) Bright field (White) |
CP000411-1F4 |
CC02292 |
|
CP000498-15K |
10 µm |
300 mm |
145 mm/s |
CC02242 |
Dark field Bright field (RGB) Bright field (White) |
CP000411-1F4 |
CC02292 |
|
CP000498-15K |
10 µm |
450 mm |
145 mm/s |
CC02242 |
Dark field Bright field (RGB) Bright field (White) |
CP000411-1F4 |
CC02292 |